Evaluation of micromechanical manufacturing processes for microfluidic devices
Evaluation of micromechanical manufacturing processes for microfluidic devices
复制标题
DOI：
10.1007/s00170-009-2326-y
复制
发表时间：
2010-06
期刊：
影响因子：
--
通讯作者：
A. Jáuregui;H. Siller;C. Rodríguez;A. Elías-Zúñiga
中科院分区：
文献类型：
--
作者：
A. Jáuregui;H. Siller;C. Rodríguez;A. Elías-Zúñiga
在本文中，几种微机械制造技术进行了研究，以表征其性能的原型微型几何形状称为微通道，这是微流体器件的主要几何特征。所使用的技术是微端铣削，线放电加工/喷砂，磨料水射流。他们的能力进行了比较，光刻能力，这是传统的微通道制造工艺。评估包括对表面质量和形貌的全面研究，在每个原型上使用先进的接触式和非接触式轮廓仪进行。为了选择最合适的微流体装置原型制造工艺，还考虑了经济因素。结果表明，微端铣削工艺可以与光刻竞争，在实现可接受的产品质量和经济水平。
In this paper, several micromechanical manufacturing technologies were studied in order to characterize their performance for prototyping miniaturized geometries known as microchannels, which are the main geometric features of microfluidic devices. The technologies used were microend milling, wire electrodischarge machining/sandblasting, and abrasive water jet. Their capabilities were compared with lithography capabilities, which is the conventional process for microchannel manufacturing. The evaluation consists in a comprehensive study of surface quality and topography, made with the help of advanced contact and noncontact profilometers over each prototype. Also economical considerations have been taken into account in order to choose the most appropriate manufacturing process for the prototyping of microfluidic devices. The results show that microend milling process can compete with lithography, in terms of achieving acceptable levels of product quality and economics.