The migration of alkali ions from glass substrates coated with sol-gel barrier films

The migration of alkali ions from glass substrates coated with sol-gel barrier films
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碱离子从涂有溶胶凝胶阻隔膜的玻璃基板上的迁移

DOI:
10.1016/0022-3093(89)90572-3
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发表时间:
1989
期刊:
影响因子:
--
通讯作者:
He Ouli
He Ouli
中科院分区:
--
文献类型:
--
作者:
Fu Guanghui;Du Jiafeng;Pan Donghui;He Ouli

文献摘要

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研究了镀膜二氧化硅或其他薄膜的玻璃基板上碱性离子的迁移特性。采用溶胶凝胶浸渍法制备了SiO_2、、SiO_2、SiO_2、、、SiO_2、_2O_3和SiO_2-_2O_5薄膜,然后在射频溅射样品上沉积了一层铟-锡-氧化物薄膜。用原子吸收光谱仪测定了不同温度热处理后碱性离子在ITO薄膜中的扩散情况。比较了不同薄膜对碱性离子扩散的阻挡作用。在本实验中,二氧化硅薄膜对碱性离子从衬底向ITO薄膜的迁移起到了非常有效的阻挡作用。厚度约为700A的二氧化硅薄膜使薄膜中的钠离子浓度从未镀膜时的1μg/cm~2降低到0.2μg/cm~2。随着薄膜厚度的增加或衬底温度的升高,SiO_2阻挡层对碱性离子迁移的影响更加明显,其他类型的薄膜对碱性离子迁移的影响与薄膜的密度和厚度有关,前者更为重要。
The migration characteristics of alkali ions from glass substrates coated with SiO2or other films were studied. Soda-lime-silica glasses were coated with SiO2, TiO2, SiO2TiO2, SiO2ZrO2, SiO2ZrO2, SiO2B2O3and SiO2P2O5films using the sol-gel dipping process and then an indium-tin-oxide film (ITO film) was deposited onto the samples of rf sputtering. After heat treatment at different temperatures, the diffusion of alkali ions into the ITO film was measured by means of atomic absorption spectroscopy. The characteristics of the different films in hindering alkali ion diffusion were compared.In our experiments the SiO2film was very effective in hindering the migration of alkali ions from the substrate into the ITO films. An SiO2film which has a thickness of about 700 Å reduced the concentration of sodium ions in the ITO film from 1 μg/cm2without barrier coating to 0.2 μg/cm2. The effect of the SiO2barrier coating was more marked when the film thickness was increased or when the substrate was treated at a higher temperature.The effect of the other kinds of film on the migration of alkali ions was dependent on the density and thickness of the film, the former being the more important.