The study on methane sensing with high-temperature low-power CMOS compatible silicon microheater
The study on methane sensing with high-temperature low-power CMOS compatible silicon microheater
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DOI：
10.1016/j.snb.2016.12.115
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发表时间：
2017-06-01
影响因子：
8.4
通讯作者：
Ding, Enjie
中科院分区：
文献类型：
--
作者：
Ma, Hongyu;Qin, Shunli;Ding, Enjie
提出了一种用于低浓度甲烷气体检测的低功耗高温硅悬臂梁微加热器。设计并制作了SOI（Silicon-On-Insulator）微加热器。通常，当使用热传导方法时，低浓度（低于爆炸下限）的甲烷几乎不可察觉。与其他甲烷传感技术相比，热传导检测方法具有独特的功能，可以最好地满足物联网的要求。在这项研究中，通过使用所提出的微加热器，热传导方法的甲烷传感温度提高到600摄氏度以上，它具有约50 mW的低功耗。依靠高的加热温度和高温引起的甲烷热导率和电阻温度系数的增加，在不使用放大器的情况下，获得了约22 mV/1%CH4的高灵敏度。实验还表明，所提出的微加热器将是一个自清洁和本质安全的设备。CMOS兼容的制造工艺将使硅微加热器能够批量制造并与外围电路单片集成，最终降低生产成本。(C)2016爱思唯尔B. V.保留所有权利。
A high-temperature silicon cantilever microheater with low power consumption was proposed for detection of low concentrations of methane gas. The microheater was designed and fabricated on SOI (Silicon-On-Insulator) wafer. Usually, methane at low concentrations (below the lower explosive limit) is almost imperceptible when using the thermal conduction method. Compared to other methane sensing technologies, the thermal conduction detection method possesses unique features that could best meet the requirements of the Internet of Things. In this research, the methane sensing temperature of the thermal conduction method increased to above 600 degrees C by using the proposed microheater, which has a low power consumption of about 50 mW. Relying on the high heating temperature and the high temperature induced increment both in methane thermal conductivity and in the temperature coefficient of resistance of the microheater, a high sensitivity of about 22 mV/1% CH4 was obtained without using an amplifier. Experiment also shows that the proposed microheater would be a self-cleaning and intrinsically safe device. The CMOS-compatible fabrication process would enable the silicon microheater to be batch fabricated and monolithically integrated with peripheral circuits, eventually lowering production costs. (C) 2016 Elsevier B.V. All rights reserved.