Micromachined multigroove silicon ATR FT-IR internal reflection elements for chemical imaging of microfluidic devices
Micromachined multigroove silicon ATR FT-IR internal reflection elements for chemical imaging of microfluidic devices
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DOI：
10.1039/c9ay02248a
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发表时间：
2019-12-07
影响因子：
3.1
通讯作者：
Burgess, Ian J.
中科院分区：
文献类型：
--
作者：
Morhart, Tyler A.;Read, Stuart T.;Burgess, Ian J.
描述了用于微流控器件的红外化学成像的低成本、微槽硅（Si）基内反射元件（μ-槽IRES）的性能。描述了一种定制设计的水平显微镜与成像焦平面阵列面积检测器的耦合。在表征了宽视场照明下的显微镜的固有失真之后，对光刻印刷在主反射表面上的棋盘图案进行成像，以确定实验装置的空间分辨率，该实验装置的空间分辨率约为每像素14 μ m。图像包含不同质量的不同区域。几何光线跟踪表明，图像中的不同分量是由通过mu槽IRE的多个光束路径引起的。可以选择高图像质量的区域以覆盖具有几百微米的横向尺寸的视场。通过在单个微流体通道中的水和重水的两个共层流之间的同位素交换的成功映射，证明了具有μ槽IRES的概念化学成像的证明。并对如何实现近衍射极限空间分辨率的成像质量进行了展望。
The performance of low-cost, microgroove silicon (Si)-based internal reflection elements (mu-groove IREs) for infrared chemical imaging of microfluidic devices is described. A custom-designed, horizontal microscope coupled with an imaging focal plane array area detector is described. After characterizing the inherent distortions of the microscope under wide field illumination, a checkerboard pattern lithographically printed on the principal reflection surface was imaged to determine the spatial resolution of the experimental setup which was approximately 14 mu m per pixel. The image contains different regions of varying quality. Geometric ray tracing indicates that the different components in the image are caused by multiple beam paths through the mu-groove IRE. Regions of high image quality can be selected to cover a field of view with lateral dimensions of several hundred micrometers. Proof of concept chemical imaging with mu-groove IREs is demonstrated through the successful mapping of isotope exchange between two co-laminar flows of water and heavy water in a single microfluidic channel. A prospective on how imaging quality with near diffraction limited spatial resolution could be achieved is also provided.