Electrothermal Microactuators With Peg Drive Improve Performance for Brain Implant Applications.
Electrothermal Microactuators With Peg Drive Improve Performance for Brain Implant Applications.
复制标题
DOI：
10.1109/jmems.2012.2203789
复制
发表时间：
2012-07-13
期刊：
影响因子：
--
通讯作者：
Muthuswamy J
中科院分区：
文献类型：
--
作者：
Anand S;Sutanto J;Baker MS;Okandan M;Muthuswamy J
提出了一种新的多晶硅微电极平面内双向平移驱动方案。新的Chevron-peg致动方案使用基于微机电系统（MEMS）的MEMS微致动器来移动微电极以用于大脑植入应用。设计变更的动机是通过对早期MEMS微电极（由Chevron闩锁型机制驱动）进行体内测试确定的特定需求。由本文讨论的Chevron-peg机制驱动的微电极在以下关键领域表现出更好的性能：更高的力生成能力（与50 μN相比，每个加热条为111 μN），更低的功耗（与360 mW相比，为91 mW），以及微电极前后运动一致的可靠性能。对V形闩锁和V形钉型驱动方案的失效分析表明，后者在超过400万次操作循环时磨损更坚固。使用统计分析优化了用于Chevron-peg致动器的激活波形的参数。具有1 ms时间周期和1 Hz操作频率的波形显示微电极的预期和实际移动之间的最小误差。因此，新一代Chevron-peg致动器和微电极有望延长植入大脑的微电极的寿命和性能。[2011-0341]
This paper presents a new actuation scheme for in-plane bidirectional translation of polysilicon microelectrodes. The new Chevron-peg actuation scheme uses microelectromechanical systems (MEMS) based electrothermal microactuators to move microelectrodes for brain implant applications. The design changes were motivated by specific needs identified by the in vivo testing of an earlier generation of MEMS microelectrodes that were actuated by the Chevron-latch type of mechanism. The microelectrodes actuated by the Chevron-peg mechanism discussed here show improved performance in the following key areas: higher force generation capability (111 μN per heat strip compared to 50 μN), reduced power consumption (91 mW compared to 360 mW), and reliable performance with consistent forward and backward movements of microelectrodes. Failure analysis of the Chevron-latch and the Chevron-peg type of actuation schemes showed that the latter is more robust to wear over four million cycles of operation. The parameters for the activation waveforms for Chevron-peg actuators were optimized using statistical analysis. Waveforms with a 1-ms time period and a 1-Hz frequency of operation showed minimal error between the expected and the actual movement of the microelectrodes. The new generation of Chevron-peg actuators and microelectrodes are therefore expected to enhance the longevity and performance of implanted microelectrodes in the brain. [2011-0341]