Replicated optical MEMS in sol-gel materials
Replicated optical MEMS in sol-gel materials
复制标题
溶胶-凝胶材料中的复制光学 MEMS
DOI：
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复制
发表时间：
2004
影响因子：
4.9
通讯作者：
S. Westenhofer
中科院分区：
文献类型：
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作者：
S. Obi;M. T. Gale;C. Gimkiewicz;S. Westenhofer
采用溶胶-凝胶材料的复制技术为目前利用光刻和微机械加工技术在硅中制造光学微电子机械系统(MEMS)提供了一种有趣的替代方法。紫外光固化的溶胶-凝胶材料的使用使得微透镜和衍射光学元件等光学特征能够在与MEMS结构相同的工艺步骤中被制造出来，并且具有低成本高分辨率大规模生产技术的潜力。本文介绍了旨在研究这一方法潜力的工作进展。
Replication technology using sol-gel materials offers an interesting alternative to the current approach to optical microelectromechanical systems (MEMS) fabricated in silicon using lithographic and micromachining technologies. The use of UV-curable sol-gel materials enables optical features such as microlenses and diffractive optical elements to be fabricated in the same process step as the MEMS structures, and has the potential of low-cost high-resolution mass-production technology. This paper describes progress in work aimed at investigating the potential of this approach.