Zero-Power Ultrasonic Wakeup Receiver Based on MEMS Switches for Implantable Medical Devices
Zero-Power Ultrasonic Wakeup Receiver Based on MEMS Switches for Implantable Medical Devices
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DOI：
10.1109/ted.2022.3140406
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发表时间：
2022-01-17
影响因子：
3.1
通讯作者：
Rinaldi, Matteo
中科院分区：
文献类型：
--
作者：
Pop, Flavius;Calisgan, Sila Deniz;Rinaldi, Matteo
本文首次展示了一种用于与植入式医疗器械（IMD）进行体内通信的零功率超声唤醒接收器。该系统是基于一个10 × 10的压电微机械超声换能器（pMUT）阵列，零功率500 nm间隙MEMS等离子体开关，低泄漏CMOS负载开关，和一个特设的传感电路。pMUT阵列在5cm的距离处接收10 mVpp的超声信号，并且当以9.09 $V_{DC}$偏置时将MEMS开关从关断状态（1 pA）带到导通状态（20 μ A）。这个小电流然后唤醒负载开关（
This article demonstrates, for the first time, a zero-power ultrasonic wakeup receiver for intra-body communication with Implantable Medical Devices (IMDs). The system is based on a 10 x 10 Piezoelectric Micromachined Ultrasonic Transducer (pMUT) array, a zero-power 500 nm gap MEMS plasmonic switch, a low-leakage CMOS load-switch, and an ad hoc sensing circuit. An ultrasonic signal of 10 mVpp is received by the pMUT array at a distance of 5 cm and brings the MEMS switch from the off-state (1 pA) to the on-state (20 mu A) when biased at 9.09 $V_{DC}$ . This small current then wakes up the load-switch (