Fabrication and modeling of the gray-scale mask based aspheric refraction microlens array
Fabrication and modeling of the gray-scale mask based aspheric refraction microlens array
复制标题
基于灰度掩模的非球面折射微透镜阵列的制作和建模
DOI：
10.1299/jsmec.46.1598
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
Chi
中科院分区：
文献类型：
--
作者：
Gou;Shuh;Chi
本研究探讨以灰阶掩模制作非球面折射微透镜阵列的制程。在本研究的第一部分，我们着重于利用灰阶光罩制作微透镜阵列的UV-LIGA制程。此外，一个两阶段的过程建模方案，提出了减少费时的试错参数调整的劳动工作。实验结果表明，该方法可以很好地模拟制作过程，并能够提供有效的制作参数，一旦提供了一个特定的微透镜的直径和高度。
In this research, the manufacturing processes of aspherical refraction microlens array by gray-scale mask if investigated. In the first part of this research, we emphasize on the gray-scale mask based microlens array fabrication processes through the UV-LIGA approach. Furthermore, a two-stage process-modeling scheme is proposed to reduce the time-consuming trail-and-error parameters tuning labor works. Experimental results demonstrate that the proposed approach can well model the fabrication process and is capable of providing effective fabrication parameters once the diameter and height of a certain microlens is provided.