Submicrometer-Order Displacement Measurements Using an Air-Coupled Ultrasonic Transducer at Frequencies of 40 and 400 kHz
Submicrometer-Order Displacement Measurements Using an Air-Coupled Ultrasonic Transducer at Frequencies of 40 and 400 kHz
复制标题
使用空气耦合超声波换能器在 40 和 400 kHz 频率下进行亚微米级位移测量
DOI：
10.1143/jjap.43.3071
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发表时间：
2004
影响因子：
1.5
通讯作者：
K. Imano
中科院分区：
文献类型：
--
作者：
K. Sasaki;M. Nishihira;K. Imano
用于测量微米或亚微米量级位移的非接触式空气耦合超声系统是在40和400 kHz频率下新建的。通过引入参考波和发射波信号之间的相位差，极大地提高了在几千个超声波波长λ下的位移测量的相位检测精度。为了验证我们的系统，在反射模式下，使用单个压电陶瓷换能器测量了由高精度机械工作台平移的反射器的位移。在空气中使用40或400 kHz的超声波，位移分辨率分别优于1微米和0.10微米(λ/8500)。
Noncontact air-coupled ultrasonic systems for measuring micrometer- or submicrometer-order displacements are newly constructed at frequencies of 40 and 400 kHz. The phase detection accuracy of the displacement measurements under several thousandths of ultrasonic wavelengths λ is markedly improved by the introduction of phase differences between the reference waves and the transmitting wave signal. To verify our system, the displacement of the reflector, which is translated by a high-precision mechanical stage, is measured using a single piezoelectric ceramic transducer in the reflection mode. Resolutions of displacement of better than 1 µm or 0.1 µm (λ/8500) using ultrasonic waves of 40 or 400 kHz in air, respectively, are achieved.