ECR sputtering and electron/ion alternative irradiation for multilayer carbon films fabrication with tunable layer thickness
ECR sputtering and electron/ion alternative irradiation for multilayer carbon films fabrication with tunable layer thickness
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DOI：
10.1016/j.surfcoat.2016.04.001
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发表时间：
2016-06
影响因子：
5.4
通讯作者：
Peidong Xue;Lei Yang;Dong-feng Diao
中科院分区：
文献类型：
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作者：
Peidong Xue;Lei Yang;Dong-feng Diao
在这项工作中，我们提出了一种电子回旋共振（ECR）溅射和电子/离子交替辐照的方法来形成具有不同单层厚度的多层碳膜。沉积软电子辐射层和保护离子辐射层作为组成层。透射电子显微镜（TEM）和拉曼光谱证明电子辐照层中的石墨烯片结构可以在多层碳膜中保留。我们发现了多层膜的表面粗糙度、机械和摩擦学性能对单层厚度的依赖性的规律。随着单层厚度的减小，表面粗糙度降低，机械和摩擦学性能显着提高。基于硬度增强和裂纹长度限制，进一步讨论了低摩擦系数和长磨损寿命的机制。这项工作表明，通过降低单层厚度，ECR溅射和电子/离子交替照射可以制备具有成分材料综合性能的薄膜，这有望在纳米层表面科学和工程领域得到广泛应用。
In this work, we proposed a method of electron cyclotron resonance (ECR) sputtering and electron/ion alternative irradiation to form multilayer carbon films with different single layer thicknesses. The soft electron irradiated layers and protective ion irradiated layers were deposited as the component layers. The transmission electron microscopy (TEM) and Raman spectra proved that the graphene sheets structure in electron irradiated layers could be preserved in multilayer carbon films. We found a rule of the dependence of the surface roughness, mechanical and tribological properties of the multilayer films on the single layer thickness. With the decrease of single layer thickness, the surface roughness decreased and the mechanical and tribological properties improved notably. The mechanisms of the long wear life with low friction coefficient were further discussed based on the hardness enhancement and the cracking length limitation. This work indicated that by decreasing the single layer thickness, ECR sputtering and electron/ion alternative irradiation can fabricate films with combined properties of the component materials, which can be expected for broad nanolayered surface science and engineering applications.