Fabrication of surface reliefs on facets of singlemode optical fibres using nanoimprint lithography
Fabrication of surface reliefs on facets of singlemode optical fibres using nanoimprint lithography
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DOI：
10.1049/el:20073075
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发表时间：
2007-02-01
影响因子：
1.1
通讯作者：
Pessa, M.
中科院分区：
文献类型：
--
作者：
Viheriala, J.;Niemi, T.;Pessa, M.
报道了使用纳米压印光刻技术制造和研究光纤切割面上的表面浮雕。所制备的结构是衍射元件和具有亚波长特征尺寸的孔阵列。获得的结果表明纳米压印光刻提供了以低制造成本小型化光学器件的机会，取代了自由空间光学元件。
Reported is the fabrication and investigation of surface reliefs on cleaved facets of optical fibres using nanoimprint lithography. The prepared structures are diffractive elements and arrays of holes with sub-wavelength feature sizes. The results obtained indicate that nanoimprint lithography affords opportunity to miniaturise optical devices at low fabrication costs, replacing free-space optical elements.