Gas flow dynamics in laser ablation deposition
Gas flow dynamics in laser ablation deposition
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DOI：
10.1063/1.350772
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发表时间：
1992-05
影响因子：
3.2
通讯作者：
J. Kools;T. Baller;S. T. Zwart;J. Dieleman
中科院分区：
文献类型：
--
作者：
J. Kools;T. Baller;S. T. Zwart;J. Dieleman
对激光烧蚀羽流的气体流动动力学进行了实验和理论研究。实验上，在模型系统（在氯环境中激光蚀刻铜）上进行了角分辨飞行时间（ARTOF）测量。得到的TOF光谱可以用椭圆麦克斯韦-玻尔兹曼分布对流速度进行拟合。在理论上，建立了一个基于膨胀椭圆气体云流体动力学问题的解析模型。该模型可以对ARTOF分布和角强度分布进行半定量预测。解释了激光烧蚀沉积中观察到的趋势，如角强度分布与原子质量和激光能量无关，以及角分布与光斑尺寸的关系。
The gas flow dynamics of laser ablation plumes is investigated experimentally and theoretically. Experimentally, angular‐resolved time‐of‐flight (ARTOF) measurements are performed on a model system (laser etching of copper in a chlorine environment). The TOF spectra obtained can be fitted by elliptical Maxwell–Boltzmann distributions on a stream velocity. Theoretically, an analytical model is constructed, based on the hydrodynamical problem of an expanding elliptical gas cloud. The model allows semiquantitative prediction of ARTOF distributions and angular intensity distributions. Observed trends in laser ablation deposition such as independence of the angular intensity distribution on mass of the atom and laser fluence, and dependence of the angular distribution on spot dimensions are explained.