Nanoscale Investigation of Optical and Electrical Properties by Dynamic-Mode Atomic Force Microscopy Using a Piezoelectric Cantilever
Nanoscale Investigation of Optical and Electrical Properties by Dynamic-Mode Atomic Force Microscopy Using a Piezoelectric Cantilever
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使用压电悬臂梁通过动态模式原子力显微镜研究光学和电学性质
DOI：
10.1143/jjap.42.4878
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发表时间：
2003
影响因子：
1.5
通讯作者：
K. Matsushige
中科院分区：
文献类型：
--
作者：
N. Satoh;K. Kobayashi;S. Watanabe;T. Fujii;T. Horiuchi;Hirofumi Yamada;K. Matsushige
我们展示了一种新的应用微加工力传感悬臂与锆钛酸铅（PZT）薄膜作为一个集成的偏转传感器的动态模式原子力显微镜（AFM）结合扫描近场光学显微镜（SNOM）。这个实验装置也适用于开尔文探针力显微镜（KFM）的局部电性能的调查。为了提高探针针尖与样品间静电力的检测灵敏度，采用了一种调频检测方法。使用导电PZT悬臂梁作为AFM/SNOM探针，研究了PbTiO 3单晶的局部光学性质。此外，还对铁电共聚物薄膜的局域光电特性进行了研究。
We demonstrated a novel application of a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor for a dynamic-mode atomic force microscope (AFM) combined with a scanning near-field optical microscope (SNOM). This experimental setup was also applied to a Kelvin-probe force microscope (KFM) for the investigation of local electrical properties. A frequency modulation (FM) detection method was used for enhancing the detection sensitivity of electrostatic forces between a probe tip and a sample. Local optical properties of a PbTiO3 single crystal were investigated using the conductive PZT cantilever as an AFM/SNOM probe. Furthermore, studies on local optical and electrical properties of ferroelectric copolymer films were also presented.