Influence of total film thickness on high-frequency magnetic properties of the [FeCoSiN/SiNx]n multilayer thin films
Influence of total film thickness on high-frequency magnetic properties of the [FeCoSiN/SiNx]n multilayer thin films
复制标题
总膜厚对[FeCoSiN/SiNx](n)多层薄膜高频磁性能的影响
DOI：
10.1016/j.jmmm.2014.08.028
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发表时间：
2015-01-15
影响因子：
2.7
通讯作者：
Peng, D. L.
中科院分区：
文献类型：
--
作者：
Liu, X. L.;Wang, L. S.;Peng, D. L.
在无外加磁场的条件下，采用交流磁控溅射法在室温下制备了不同层数的[FeCoSiN/SiNx]（n）多层薄膜。通过透射电子显微镜（TEM）观察到由7 nm FeCoSiN磁性层和2nm SiN绝缘层组成的良好限定的叠层结构。用振动样品磁强计（VSM）测量了[FeCoSiN/SiNx]（n）多层薄膜的静态磁滞回线，结果表明，薄膜具有明显的面内单轴磁各向异性。利用矢量网络分析仪和LLG方程研究了[FeCoSiN/SiNx]（n）多层膜的动态磁性能。结果表明，薄膜总厚度对多层薄膜的高频磁性能影响不大。当[FeCoSiN/SiNx]（n）多层膜的总厚度增加到微米级时，它们仍然保持令人鼓舞的高频磁性能和电性能：铁磁共振频率f（r）=3.74 GHz，真实的磁导率μ '= 93.73，电阻率ρ = 196 μ Ω cm。(C)© 2014 Elsevier B. V.版权所有
[FeCoSiN/SiNx](n) multilayer thin films with different number of layers were fabricated by alternating magnetron sputtering at room temperature with no external magnetic field applied on substrates. A well-defined laminated structure consisting of 7 nm FeCoSiN magnetic layer and 2 nm SiN insulating layer was observed by transmission electron microscopy (TEM). The static magnetic hysteresis loops of the [FeCoSiN/SiNx](n) multilayer thin films measured by vibrating sample magnetometer (VSM) presented an obvious in-plane uniaxial magnetic anisotropy. The dynamic magnetic performance of the [FeCoSiN/SiNx](n) multilayer films was studied by vector network analyzer and LLG equation. The results indicated that the total film thickness has slightly impact on the high-frequency magnetic performance of the multilayer thin films. When the total thickness of the [FeCoSiN/SiNx](n) multilayer thin films increased to micron level, they could still maintain encouraging high-frequency magnetic properties and electrical property: the ferromagnetic resonance frequency f(r)=3.74 GHz, real permeability mu'=93.73, and electrical resistivity rho= 196 mu Omega cm. (C) 2014 Elsevier B.V. All rights reserved