The impact of substrate resistivity on ESD protection devices

The impact of substrate resistivity on ESD protection devices
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DOI:
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发表时间:
2002-10
期刊:
2002 Electrical Overstress/Electrostatic Discharge Symposium
影响因子:
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通讯作者:
T. Smedes;A. Heringa;J. van Zwol;P. de Jong
T. Smedes;A. Heringa;J. van Zwol;P. de Jong
中科院分区:
其他
文献类型:
--
作者:
T. Smedes;A. Heringa;J. van Zwol;P. de Jong

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The substrate resistivity has a serious impact on the behaviour of ESD protection devices. TLP characterisation and failure analysis show that different failure mechanisms occur, depending on the substrate resistivity. The mechanisms leading to these phenomena are explained and the consequences for porting IO designs to other substrate types are discussed.