White light interferometry with spectral-temporal demodulation for large-range thickness measurement

White light interferometry with spectral-temporal demodulation for large-range thickness measurement
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DOI:
10.3788/col202220.091201
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发表时间:
2022
影响因子:
3.5
通讯作者:
Yunlong Zhu;Zhuoran Li;Xu Lu;Yonggui Yuan;J. Yang
Yunlong Zhu;Zhuoran Li;Xu Lu;Yonggui Yuan;J. Yang
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Yunlong Zhu;Zhuoran Li;Xu Lu;Yonggui Yuan;J. Yang

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Yunlong Zhu (朱云龙), Zhuoran Li (李卓然), Xu Lu (卢 旭), Yonggui Yuan (苑勇贵), and Jun Yang (杨 军) 1 Key Laboratory of In-fiber Integrated Optics, Ministry of Education of China, Harbin Engineering University, Harbin 150001, China 2 College of Physics and Optoelectronic Engineering, Harbin Engineering University, Harbin 150001, China 3 Guangdong Provincial Key Laboratory of Information Photonics Technology (Guangdong University of Technology), Guangzhou 510006, China 4 School of Information Engineering, Guangdong University of Technology, Guangzhou 510008, China