White light interferometry with spectral-temporal demodulation for large-range thickness measurement
White light interferometry with spectral-temporal demodulation for large-range thickness measurement
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DOI:
10.3788/col202220.091201
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发表时间:
2022
影响因子:
3.5
通讯作者:
Yunlong Zhu;Zhuoran Li;Xu Lu;Yonggui Yuan;J. Yang
中科院分区:
文献类型:
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作者:
Yunlong Zhu;Zhuoran Li;Xu Lu;Yonggui Yuan;J. Yang