Precise Control of Highly Ordered Arrays of Nested Semiconductor/Metal Nanotubes
Precise Control of Highly Ordered Arrays of Nested Semiconductor/Metal Nanotubes
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DOI：
10.1007/s12274-010-0066-9
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发表时间：
2011-02-01
期刊：
影响因子：
9.9
通讯作者：
Mueller, Frank
中科院分区：
文献类型：
--
作者：
Gu, Diefeng;Baumgart, Helmut;Mueller, Frank
光刻定义的微孔模板与原子层沉积（ALD）技术相结合，能够显着控制复杂的新型嵌套纳米管结构。迄今为止，物理过程参数的三维控制尚未完全实现高精度分辨率，需要优化以实现更广泛的潜在应用。此外，复合绝缘氧化物层与半导体层和金属交替的组合可以提供各种类型的新颖应用，并最终提供独特且先进水平的多功能纳米级器件。半导体TiO(2)纳米管在光伏器件中具有潜在的应用前景。纳米结构半导体材料与嵌套金属纳米管的组合具有生产新型多功能垂直有序三维纳米器件的潜力。人们已经探索了 ALD 法生长铂，涵盖了薄膜成核过程的初始阶段和高纵横比纳米管结构的合成。研究了 Pt 进入具有不同孔径和纵横比的多孔模板的渗透深度。使用微孔硅模板成功地制备了多个串联的多壁嵌套TiO(2)-Pt纳米管。这些创新的嵌套纳米结构有潜力在光伏和传感技术中生产新型多功能垂直有序三维纳米器件。
Lithographically defined microporous templates in conjunction with the atomic layer deposition (ALD) technique enable remarkable control of complex novel nested nanotube structures. So far three-dimensional control of physical process parameters has not been fully realized with high precision resolution, and requires optimization in order to achieve a wider range of potential applications. Furthermore, the combination of composite insulating oxide layers alternating with semiconducting layers and metals can provide various types of novel applications and eventually provide unique and advanced levels of multifunctional nanoscale devices. Semiconducting TiO(2) nanotubes have potential applications in photovoltaic devices. The combination of nanostructured semiconducting materials with nested metal nanotubes has the potential to produce novel multifunctional vertically-ordered three-dimensional nanodevices. Platinum growth by ALD has been explored, covering the initial stages of the thin film nucleation process and the synthesis of high aspect ratio nanotube structures. The penetration depth of the Pt into porous templates having various pore sizes and aspect ratios has been investigated. Several multi-walled nested TiO(2)-Pt nanotubes in series have been successfully fabricated using microporous Si templates. These innovative nested nanostructures have the potential to produce novel multifunctional vertically-ordered three-dimensional nanodevices in photovoltaic and sensing technologies.