Daiki Kamiya: "Electrostatic Comb-Drive Actuators made of Polyimide for actuating micromotion convert mechanisms"Microsystem Technologies. 161-165 (1999)

Daiki Kamiya: "Electrostatic Comb-Drive Actuators made of Polyimide for actuating micromotion convert mechanisms"Microsystem Technologies. 161-165 (1999)
复制标题

Daiki Kamiya:“由聚酰亚胺制成的静电梳状驱动执行器,用于驱动微动转换机构”Microsystem Technologies。

DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
--
中科院分区:
--
文献类型:
--
作者:

文献摘要

相似文献