Daiki Kamiya: "Electrostatic Comb-Drive Actuators made of Polyimide for actuating micromotion convert mechanisms"Microsystem Technologies. 161-165 (1999)
Daiki Kamiya: "Electrostatic Comb-Drive Actuators made of Polyimide for actuating micromotion convert mechanisms"Microsystem Technologies. 161-165 (1999)
复制标题
Daiki Kamiya:“由聚酰亚胺制成的静电梳状驱动执行器,用于驱动微动转换机构”Microsystem Technologies。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: