A Piezoelectric Membrane Sensor for Biomedical Monitoring
A Piezoelectric Membrane Sensor for Biomedical Monitoring
复制标题
用于生物医学监测的压电薄膜传感器
DOI：
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
A. Blouin
中科院分区：
文献类型：
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作者：
Y. Ono;Q. Liu;M. Kobayashi;C. Jen;A. Blouin
研制了一种由金属箔、压电陶瓷薄膜和上电极组成的压电薄膜传感器。在不锈钢箔上涂覆锆钛酸铅复合膜，并使用银浆形成上电极。SS箔用作底部电极以及衬底。由于压电薄膜和薄金属膜基底中的孔隙率，实现了高柔性。通过扫描电子显微镜观察孔隙率。该膜传感器已被用作单压电晶片型弯曲传感器以及超声波传感器。使用这种传感器的生物医学应用进行了演示。该传感器直接连接到手腕上，并成功地获得了对应于动脉脉搏波的信号。信号的信噪比优于20 dB。呼吸曲线也在人的腹部进行了测量。此外，从手指骨反射的超声波信号观察与脉冲回波技术。因此，该传感器可以用作可穿戴传感器，其不干扰包括睡眠在内的日常生活活动，用于实时和连续监测个人健康状况。关键词-压电薄膜传感器;单压电晶片;超声探头;生物医学监测
A piezoelectric membrane sensor, consisting of a metal foil, a piezoelectric ceramic film and a top electrode, has been developed. Thick lead zirconate titanate composite film was coated onto a stainless steel (SS) foil and a top electrode was formed using a sliver paste. The SS foil served as the bottom electrode as well as the substrate. Due to the porosity in the piezoelectric film and the thin metallic membrane substrate, the high flexibility was realized. The porosity was observed by a scanning electron microscopy. This membrane sensor has been worked as a unimorph-type bending sensor as well as an ultrasonic sensor. Biomedical applications using this sensor were demonstrated. The sensor was directly attached onto a wrist and signals corresponding to arterial pulse waves have been successfully obtained. The signals had a signal-to-noise ratio of better than 20dB. Breathing curves were also measured on a human belly. In addition, ultrasonic signal reflected from a finger bone was observed with a pulse-echo technique. Thus, this sensor could be used as a wearable sensor, which does not disturb daily life activities including sleeping, for real-time and continuous monitoring of personal health conditions. Keywords-piezoelectric membrane sensor; unimorph; ultrasonic probe; biomedical monitoring