Cosine Error-Free Metrology Tool Path Planning for Thickness Profile Measurements
Cosine Error-Free Metrology Tool Path Planning for Thickness Profile Measurements
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DOI：
10.1115/1.4048433
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发表时间：
2021-04
影响因子：
4
通讯作者：
Xiangyu Guo;Chabum Lee
中科院分区：
文献类型：
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作者：
Xiangyu Guo;Chabum Lee
本文提出了一种新型的厚度轮廓测量系统，该系统可以实现双面薄管壁表面的非接触、连续、无余弦误差和快速测量。为了消除余弦误差，设计了一种曲面测量刀具轨迹，使位移传感器始终垂直于双面表面。一对放置在旋转轴和直线轴上的电容式传感器同时扫描薄壁的内外表面。由于旋转轴的旋转误差会严重影响厚度轮廓测量的精度，因此最初采用反转方法来表征这种误差。在测量目标时沿旋转方向进行补偿。制备了两个测量目标（圆形和椭圆形金属管型薄壁），验证了所开发的测量方法和系统。不仅测量了内、外表面轮廓，还测量了薄壁厚度轮廓。根据输出数据，计算了圆度和壁厚的变化。厚度分布结果与接触式千分尺（1µm分辨率）在每6°间隔上得到的结果一致。该测量系统的刀具轨迹规划的不确定度预算估计约为1.4µm。
This paper presents a novel thickness profile measuring system that measures double-sided thin pipe wall surfaces in a non-contact, continuous, cosine error-free, and fast manner. The surface metrology tool path was developed to align the displacement sensors always normal to the double-sided surfaces to remove cosine error. A pair of capacitive-type sensors that were placed on the rotary and linear axes simultaneously scans the inner and outer surfaces of thin walls. Because the rotational error of the rotary axis can severely affect the accuracy in thickness profile measurement, such error was initially characterized by a reversal method. It was compensated for along the rotational direction while measuring the measurement target. Two measurement targets (circular and elliptical metal pipe-type thin walls) were prepared to validate the developed measurement method and system. Not only inner and outer surface profiles but also thin-wall thickness profiles were measured simultaneously. Based on the output data, the circularity and wall thickness variation were calculated. The thickness profile results showed a good agreement with those obtained by a contact-type micrometer (1-µm resolution) at every 6-deg interval. The uncertainty budget for this measuring system with metrology tool path planning was estimated at approximately 1.4 µm.