Hysteresis and creep compensation for piezoelectric actuator in open-loop operation
Hysteresis and creep compensation for piezoelectric actuator in open-loop operation
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DOI：
10.1016/j.sna.2005.03.056
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发表时间：
2005-07-29
影响因子：
4.6
通讯作者：
Sun, LN
中科院分区：
文献类型：
--
作者：
Ru, CH;Sun, LN
压电作动器在当今各种定位装置中得到了广泛的应用。然而，压电驱动器的一个主要缺点是其开环控制精度受到迟滞和蠕变效应的严重限制。本文提出了一种基于逆控制的开环压电作动器滞回和蠕变同步补偿方法。由滞回数学模型和蠕变数学模型构成逆控制的基础，可以精确地描述两种现象。详细介绍了求解迟滞和蠕变逆模型的方法。最后，根据该方法对压电作动器进行了期望轨迹的跟踪控制实验，实验结果表明，与不加补偿的传统开环控制相比，该方法在开环操作下的定位精度有明显提高。(C) 2005 Elsevier B.V.版权所有
Piezoelectric actuators are frequently used nowadays in a wide variety of positioning devices. However, a major deficiency of piezoelectric actuators is that their open-loop control accuracy is seriously limited by hysteresis and creep effects. This paper describes a method for simultaneous compensation of the hysteresis and creep of piezoelectric actuator based on an inverse control in open-loop operation. The basis of the inverse control is formed by a hysteresis mathematical model and a creep model, which can describe precisely two phenomena. The method of solving inverse models of hysteresis and creep is described detailedly. Finally, a tracking control experiment of piezoelectric actuators for a desired trajectory is performed according to the proposed method and the experimental results demonstrate that the positioning precision is noticeably improved in open-loop operation compared to the conventional open-loop control without any compensation. (C) 2005 Elsevier B.V. All rights reserved.