Characterization of as-deposited and sintered yttrium iron garnet thick films formed by aerosol deposition
Characterization of as-deposited and sintered yttrium iron garnet thick films formed by aerosol deposition
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DOI：
10.7567/apex.7.035501
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发表时间：
2014-03
影响因子：
2.3
通讯作者：
Scooter D. Johnson;E. Glaser;S. Cheng;F. Kub;C. Eddy
中科院分区：
文献类型：
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作者：
Scooter D. Johnson;E. Glaser;S. Cheng;F. Kub;C. Eddy
我们采用气溶胶沉积方法(ADM)，在室温下以1-3微米/分钟的速率在蓝宝石上直接写入39微米厚的Y铁石榴石多晶薄膜，作为集成到微波磁路中的第一步。由此得到的随机取向多晶薄膜由断裂的致密纳米微晶组成。在1280°C进行后沉积烧结后，密度和磁性能更接近于块体。这些结果表明，ADM有望在高沉积速率下沉积非常厚的薄膜，以生成结构和磁性均匀的薄膜，并保持原始粉末的结构特性。
We have employed the aerosol deposition method (ADM) to direct-write 39-µm-thick polycrystalline films of yttrium iron garnet at room temperature onto sapphire at a rate of 1–3 µm/min as a first step toward integration into microwave magnetic circuits. The resulting randomly oriented polycrystalline films are composed of fractured compact nanosized crystallites. Upon postdeposition sintering at 1280 °C the density and magnetic properties become closer to those of the bulk. These results suggest that the ADM shows promise for depositing very thick films at high deposition rates to produce structurally and magnetically uniform films that retain the structural properties of the starting powder.