A scattering spectrometer for white light interferometry
A scattering spectrometer for white light interferometry
复制标题
用于白光干涉测量的散射光谱仪
DOI：
10.1016/j.optlaseng.2023.107743
复制
发表时间：
2023-10
影响因子：
4.6
通讯作者：
Q. Sun;J. Williamson;T. Vettenburg;D. Phillips;H. Martin;G. Brambilla;X. Jiang;M. Beresna
中科院分区：
文献类型：
--
作者：
Q. Sun;J. Williamson;T. Vettenburg;D. Phillips;H. Martin;G. Brambilla;X. Jiang;M. Beresna
White light interferometry is a non-contact method to measure surface topography. The depth profile of the surface is typically encoded in the spectrum of the reflected light, and a spectrometer is used to decode this signal. In this work, we demonstrate a new form of spectral interferometry, a subset of white light interferometry, in which the conventional spectrometer is replaced with an engineered scattering chip and a camera. The chip is created using laser direct writing to controllably embed scattering centres within a bulk silica substrate, forming a highly stable optical scattering element. Calibration of our device is straight-forward: we circumvent the need for spectral characterisation and computational extraction of the spectrum, and instead directly measure the relationship between surface depth and the white light speckle pattern. Using our technique, we demonstrate surface profile measurements with a resolution of 27 nm over a range of 0.5 mm. Our work provides a new route to the development of potentially compact and low-cost white light interferometers with implications for the measurement of distance, strain, temperature, pressure, and more.
