Particle-free inkjet printing of nanostructured porous indium tin oxide thin films
Particle-free inkjet printing of nanostructured porous indium tin oxide thin films
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DOI：
10.1039/c3ra40487k
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发表时间：
2013-01-01
期刊：
影响因子：
3.9
通讯作者：
Belova, Lyubov
中科院分区：
文献类型：
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作者：
Fang, Mei;Aristov, Andrey;Belova, Lyubov
我们报告了一种简单、低成本、单步喷墨打印方法，用于制造纳米结构、高透明和导电的ITO薄膜，该方法完全避免了在制造过程中使用ITO颗粒。在我们的方法中，墨水由液体溶液形成，呈现适当选择的铟和锡醋酸盐混合物。喷射打印后，油墨在随后的退火步骤中分解，其中释放的CO2气泡控制ITO成核过程，从而提供多孔膜结构。研究表明，制备的ITO薄膜具有高度结晶性、化学计量性和纳米多孔性，孔隙度可控。电学测量表明，与其他方法制备的最佳ITO薄膜相比，薄膜的电阻率值相对较低（低至0.029 ω cm）。光学椭偏测试表明，在500 ~ 1700 nm的光谱范围内，薄膜具有较高的折射率（1.5 ~ 1.7）和高透明度。由于该方法不需要任何预制的ITO颗粒、掩膜或模板，并且可以在各种材料和形状的衬底上沉积薄膜，因此可以用于制造纳米多孔ITO薄膜，用于多种应用，包括太阳能电池、生物和化学传感等。
We report a simple, low-cost, single-step inkjet printing method for the fabrication of nanostructured, highly transparent and conductive ITO films, which completely avoids the use of ITO particles in the fabrication process. In our method, the inks are formed from a liquid solution presenting a properly selected mixture of indium and tin acetates. After jet printing, the ink is decomposed during a subsequent annealing step, in which the released CO2 gas bubbles control the ITO nucleation process to provide a porous film texture. We show that the fabricated ITO films are highly crystalline, stoichiometric, and nanoporous with controlled porosity. Electrical measurements show relatively low resistivity values for the films (down to 0.029 Omega cm) comparable to those of the best ITO thin films fabricated by other methods. Optical ellipsometry tests demonstrate a relatively high refractive index (1.5-1.7) and high transparency of the films over a wide region of the spectrum ranging from 500 to 1700 nm. Since the method does not require any pre-fabricated ITO particles, masks or templates, and enables the deposition of films on substrates of various materials and shapes, it can be employed for fabrication of nanoporous ITO films for a diversity of applications, including solar cell, bio- and chemical sensing, etc.