Empirical Transfer Function Estimation With Differential Filtering and Its Application to Fine Positioning Control of Galvano Scanner
Empirical Transfer Function Estimation With Differential Filtering and Its Application to Fine Positioning Control of Galvano Scanner
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DOI：
10.1109/tie.2022.3217616
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发表时间：
2023
影响因子：
7.7
通讯作者：
Y. Maeda;M. Iwasaki
中科院分区：
文献类型：
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作者：
Y. Maeda;M. Iwasaki
快速精确的点对点（PTP）定位控制是提高工业机器生产能力和产品质量的关键技术。本研究的目的是调查的频率响应函数（FRF）估计方法与差分滤波（ETFE-Diff：经验传递函数估计与差分滤波），使用的输入和输出信号的PTP运动在处理操作和应用ETFE-Diff的前馈（FF）补偿调整。在这项研究中，ETFE-Diff的FRF估计的原理是明确的，相比于现有的FRF估计方法，即，经验传递函数估计和局部合理建模。此外，有效的ETFE-Diff FF补偿调整，提高定位精度的电流扫描器作为工业伺服系统的实验证明。
Fast and precise point-to-point (PTP) positioning control is a critical technology for improving the throughput and product quality of industrial machines. This study aims to investigate the frequency response function (FRF) estimation method with differential filtering (ETFE-Diff: empirical transfer function estimation with differential filtering) that uses the input and output signals of PTP motion during processing operation and to apply ETFE-Diff to a feedforward (FF) compensation adjustment. In this study, the principle of ETFE-Diff for FRF estimation was clarified, compared to the existing FRF estimation methods, i.e., empirical transfer function estimation and local rational modeling. Moreover, the effectiveness of ETFE-Diff for FF compensation adjustment in improving positioning accuracy of a galvano scanner as an industrial servo system was experimentally demonstrated.