Measurements of image quality and surface shape of microlens arrays for Shack-Hartmann wavefront sensors
Measurements of image quality and surface shape of microlens arrays for Shack-Hartmann wavefront sensors
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Shack-Hartmann 波前传感器微透镜阵列的图像质量和表面形状测量
DOI：
10.1117/12.2562199
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发表时间：
2020
期刊：
影响因子：
--
通讯作者：
Oya Shin
中科院分区：
文献类型：
--
作者：
Terao Koki;Akiyama Masayuki;Oya Shin
我们给出了八种不同焦距平凸型微透镜阵列(MLA)的能量平方评估结果。最高的效率是在无AR涂层的300μm间距的正方形光圈中观察到的，与子光圈的均匀照明相比，它显示79%的光分布在第一暗环内。为了定量解释观测到的能量平方的差异，我们使用激光干涉仪测量了这些MLA的表面形状。通过对平均能量和表面形状的比较，可以解释在相同间距为300μm的情况下，单个微透镜的平方能量比其他微透镜的低，这可以用每个透镜外部理想形状的偏差来解释。
We present the results of the evaluation of the ensquared energy of eight commercially available and custom made Microlens arrays (MLAs) with different focal length Plano-Convex microlens. The highest efficiency is observed with a 300 μm pitch MLA with no AR-coating and square apertures, which show 79% light ensquared within the first dark ring compared to the uniform illumination of the sub-aperture. To quantitatively explain the observed difference in the ensquared energy, we measured the surface shape of these MLAs using a laser interferometer. The comparison between the ensquared energy and the surface shape inferred that the lower ensquared energy of a MLA than the other MLAs with same 300 μm pitch can be explained with the deviation of the ideal shape at the outer part of the each lens.