Magnetic properties of BaM∕Pd–Pt double-layered thin film deposited at various substrate temperatures
Magnetic properties of BaM∕Pd–Pt double-layered thin film deposited at various substrate temperatures
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DOI：
10.1063/1.1851418
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发表时间：
2005-05
影响因子：
3.2
通讯作者：
N. Shams;Xiaoxi Liu;M. Matsumoto;A. Morisako
中科院分区：
文献类型：
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作者：
N. Shams;Xiaoxi Liu;M. Matsumoto;A. Morisako
研究了在400 ~ 600 °C的不同衬底温度（Ts）下溅射沉积在Pt、Pd和Pd-Pt合金衬底上的钡铁氧体（BaM）薄膜的晶体结构和磁性。结果表明，BaM scinPd-Pt薄膜的垂直方向矫顽力（Hcperp）高于沉积在Pd和Pt衬底上的BaM薄膜。BaM scinPd-Pt薄膜的C轴取向可以在450°C的非常低的Ts下实现，对于30-nm BaM，Hcperp为2.1kOe。
Crystallographic and magnetic properties of barium ferrite (BaM) thin films deposited onto Pt, Pd, and an alloy of Pd–Pt underlayers by sputtering at different substrate temperatures (Ts) from 400to600°C have been studied. It is found that the coercivity values in the perpendicular direction (Hcperp) of the BaM∕Pd–Pt films are higher than those of the BaM films deposited on Pd and Pt underlayers. C-axis orientation of BaM∕Pd–Pt film can be achieved at very low Ts of 450°C with a Hcperp of 2.1kOe for 30-nm BaM.