Highly reflecting aluminum-protected optical coatings for the vacuum-ultraviolet spectral range
Highly reflecting aluminum-protected optical coatings for the vacuum-ultraviolet spectral range
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DOI：
10.1364/ao.45.000178
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发表时间：
2006-01-01
期刊：
影响因子：
1.9
通讯作者：
Kaiser, N
中科院分区：
文献类型：
--
作者：
Yang, MH;Gatto, A;Kaiser, N
讨论了在真空紫外光谱区保存高反射率铝镜的方法。提出了单氟化物和氧化物层、均质多层和混合多层溶液。单氟化物和氧化物材料在193nm处的反射率达到90%以上。多层封盖在193 nm处的反射率为93.4%，氟化物和氧化物混合多层封盖在160 nm处的反射率可达到90%以上。(c) 2006年美国光学学会。
We discuss the approaches to preserve the high-reflectance aluminum mirror for the vacuum-ultraviolet spectral region. Single fluoride and oxide layers, a homogeneous multilayer, and hybrid multilayer solutions are put forward. Single fluoride and oxide materials have achieved reflectance above 90% at 193 nm. Multilayer capping can provide reflectance of 93.4% at 193 nm, and a hybrid multilayer of fluoride and oxide can achieve reflectance above 90% to 160 nm. (c) 2006 Optical Society of America.