A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone
A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone
复制标题
单片集成仿生三维 MEMS 矢量水听器
DOI：
10.1109/access.2019.2924990
复制
发表时间：
2019-01-01
期刊：
影响因子：
3.9
通讯作者：
Zhang, Wendong
中科院分区：
文献类型：
--
作者：
Song, Jinlong;Wang, Renxin;Zhang, Wendong
三维矢量水听器在水下空间定位中起着重要的作用。针对以往三维矢量水听器存在的单片集成度和线性度问题，提出了一种基于压阻效应和仿生原理的三维MEMS矢量水听器。与以往的三维矢量水听器不同，该三维MEMS矢量水听器是单片集成的。它具有高一致性和批量生产的特点。在$x $-和$y $-方向上的声压梯度由纤毛检测，并且在$z $方向上的声压梯度由支撑块和梁检测。<inline-formula><tex-math notation="LaTeX"></tex-math></inline-formula><inline-formula><tex-math notation="LaTeX"></tex-math></inline-formula><inline-formula><tex-math notation="LaTeX"></tex-math></inline-formula>建立了梁表面纵向应力和水听器前三阶固有频率的数学模型。仿真结果验证了数学模型的正确性。确定了水听器的具体结构参数，并将所设计的水听器制作在绝缘体上硅（SOI）晶片上。最后，对所设计的水听器进行了灵敏度和指向性测试。在400 Hz时，X通道和Z通道的灵敏度分别为− 187 dB和− 163 dB（0 dB表示1 $\text {V}\mu $Pa − 1）。<inline-formula><tex-math notation="LaTeX"></tex-math></inline-formula><sup></sup>测试结果表明，该水听器具有良好的空间定位性能。
Three-dimensional vector hydrophone plays an important role in underwater spatial location. In order to solve the problems of monolithic integration and linearity of previous three-dimensional vector hydrophones, a three-dimensional micro-electro-mechanical system (MEMS) vector hydrophone based on the piezoresistive effect and bio-inspired principle is proposed in this paper. Different from previous three-dimensional vector hydrophone, this three-dimensional MEMS vector hydrophone is monolithically integrated. It has the characteristics of high consistency and batch production. Acoustic pressure gradients in <inline-formula> <tex-math notation="LaTeX">$x$ </tex-math></inline-formula>- and <inline-formula> <tex-math notation="LaTeX">$y$ </tex-math></inline-formula>-directions are detected by the cilium, and acoustic pressure gradient in the <inline-formula> <tex-math notation="LaTeX">$z$ </tex-math></inline-formula> direction is detected by the supporting block and beams. Mathematical models of longitudinal stress on the surface of beams and the first three-order natural frequencies of the hydrophone are established. The simulation results prove the accuracy of the mathematical models. Specific structure parameters of hydrophone are determined and then the designed hydrophone is fabricated on a silicon-on-insulator (SOI) wafer. Finally, the sensitivities and directivities of designed hydrophone are tested. The sensitivities of X-channel and Z-channel are −187 dB and −163 dB (0 dB referring to 1 <inline-formula> <tex-math notation="LaTeX">$\text{V}\mu $ </tex-math></inline-formula>Pa<sup>−1</sup>) at 400 Hz, respectively. The test results show that the hydrophone promising in spatial location.