MEASUREMENT OF SURFACE TEXTURE AND TOPOGRAPHY BY DIFFERENTIAL LIGHT-SCATTERING
MEASUREMENT OF SURFACE TEXTURE AND TOPOGRAPHY BY DIFFERENTIAL LIGHT-SCATTERING
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DOI：
10.1016/0043-1648(79)90143-1
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发表时间：
1979-01-01
期刊：
影响因子：
5
通讯作者：
CHURCH, EL
中科院分区：
文献类型：
--
作者：
CHURCH, EL
讨论了使用光散射作为测量二维表面形貌的工具。各种版本的散射理论被用来探索散射强度的角分布和表面特征之间的关系，并反过来表达各种确定性和统计完成参数的散射测量。特别注意的是，由于金刚石车削表面表现出丰富多样的功能和其日益增长的技术重要性的表征。
The use of light scattering as a tool for the measurement of two-dimensional surface topography is discussed. Various versions of scattering theory are used to explore the relation between the angular distribution of the scattered intensity and surface features, and inversely to express various deterministic and statistical finish parameters in terms of scattering measurements. Particular attention is paid to the characterization of diamond-turned surfaces because of the rich variety of features they exhibit and their increasing technological importance.