Mechanism of diffusional transport during ion nitriding of aluminum

Mechanism of diffusional transport during ion nitriding of aluminum
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铝离子渗氮过程中的扩散传输机制

DOI:
10.1063/1.126070
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发表时间:
2000
影响因子:
4
通讯作者:
W. Möller
W. Möller
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
T. Telbizova;S. Parascandola;U. Kreissig;R. Günzel;W. Möller

文献摘要

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利用标记物和同位素序列技术,结合离子束分析,研究了铝低能离子氮化过程中的扩散输运机制。当离子能量为1keV,温度为40 0 °C时,氮化物生长在表面,铝由底层扩散提供。
The mechanism of diffusional transport during low-energy ion nitriding of aluminum has been investigated using marker and isotope sequence techniques in connection with ion-beam analysis. For an ion energy of 1 keV and a temperature of 400 °C, it is shown that the nitride grows at the surface with aluminum being supplied by diffusion from the underlying bulk.