An investigation of the experimental conditions and characteristics of a nano-wear test
An investigation of the experimental conditions and characteristics of a nano-wear test
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DOI：
10.1016/0043-1648(95)90195-7
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发表时间：
1995-03
期刊：
影响因子：
5
通讯作者：
Zhaoguo Jiang;Chung-Jen Lu;D. Bogy;T. Miyamoto
中科院分区：
文献类型：
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作者：
Zhaoguo Jiang;Chung-Jen Lu;D. Bogy;T. Miyamoto
利用点接触显微镜(PCM)进行了纳米磨损试验，以表征超薄膜(5 nm-1000 nm)和微机械零件的耐磨性。文中详细介绍了试验过程。描述性表征参数定义为磨损深度或临界磨损周期。该测试具有纳米和纳米牛顿分辨率，具有良好的重复性，能够在不受外部几何影响或衬底变形影响的情况下评估薄膜的摩擦学性能。金(Au)薄膜的纳米磨损试验表明，载荷力、扫描循环次数、扫描速度、扫描间距和针尖类型等实验条件对测试结果有显著影响。因此，该方法是一种相对表征方法，即在相同的试验条件下比较不同材料的相对耐磨性。
A point contact microscope (PCM) is used to conduct nano-wear tests that can characterize the wear durability of ultra thin films (5 nm-1000 nm) and micromachine parts. The test procedures are described in detail. The descriptive characterization parameters are defined as wear depth or critical wear cycle. The test has nanometer and nano-Newton resolution with good repeatability, and it is able to evaluate the tribological properties of thin films without the outside influence of geometry or distortion effects from the substrate. Nano-wear tests on a gold (Au) film show that the experimental conditions, including loading force, number of scan cycles, scan speed, scan pitch and tip type have significant influence on the test results. Therefore, this method is a relative characterization method, i.e. it is useful for comparing the relative wear durability of different materials under the same test conditions.