Pressure waves generated in a Grimm-type pulsed glow discharge source and their influence on discharge parameters
Pressure waves generated in a Grimm-type pulsed glow discharge source and their influence on discharge parameters
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DOI：
10.1039/c0ja00182a
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发表时间：
2011-04
影响因子：
3.4
通讯作者：
M. Voronov;V. Hoffmann;W. Buscher;C. Engelhard;S. Ray;G. Hieftje
中科院分区：
文献类型：
--
作者：
M. Voronov;V. Hoffmann;W. Buscher;C. Engelhard;S. Ray;G. Hieftje
用插入麦克风的方法研究了格里姆源脉冲辉光放电(PGD)中的气体压力波。压力振动的一次和二次谐波与放电室的谐振频率(2.7 kHz)很好地吻合。气体压力波的形成发生在约15 0微米的S光谱分析的边缘。结果表明，压力变化对等离子体的电流、光发射等参数有显著影响。讨论了压力波产生的可能机制。在今后的研究中，应考虑此处提出的结果，例如用于放电优化、诊断、等离子体模拟和相应的等离子体分析设置。
Gas pressure waves in both argon and helium direct current (dc) pulsed glow discharge (PGD) in a Grimm-type source were found and studied with an inserted microphone. First and second harmonics of pressure vibrations were found to be in good agreement with the resonant frequency (2.7 kHz) of the discharge cell. Formation of the gas pressure wave takes place during about 150 µs in edges of PGD. Significant influence of pressure changes on the plasma parameters such as electrical current and optical emission was found. Possible mechanisms responsible for the generation of pressure waves are discussed. In future studies, the results presented here should be taken into account, e.g. for discharge optimization, diagnostics, plasma simulations and corresponding plasma-analytical setups.