Dislocation tomography made easy: a reconstruction from ADF STEM images obtained using automated image shift correction
Dislocation tomography made easy: a reconstruction from ADF STEM images obtained using automated image shift correction
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位错断层扫描变得简单：使用自动图像偏移校正获得的 ADF STEM 图像进行重建
DOI：
10.1088/1742-6596/126/1/012013
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
P. Midgley
中科院分区：
文献类型：
--
作者：
J. Sharp;J. Barnard;K. Kaneko;K. Higashida;P. Midgley
在以前的工作产生一个成功的3D断层重建的位错在GaN从传统的弱束暗场（WBDF）图像后，我们已经重建了一个级联的位错在变形和退火的硅到一个可比的标准使用更实验简单的技术干环形暗场成像（干ADF）。在这种模式下，图像对比度是更一致的试样倾斜范围比在传统的弱光束暗场成像。因此，自动采集软件可以在每个倾斜角度将正确的位错阵列恢复到视场中，尽管仍然需要手动聚焦。使用FEI的Inspect3D软件通过顺序迭代重建技术进行重建。位错沿沿着级联不均匀分布，在密集的团块之间具有稀疏区域，其中在图像和重建中可以区分面内图像宽度为24 nm的单个位错。密集的地区表现出更复杂的堆垛层错对比，阻碍层析重建。一般的三维形式的致密的区域被很好地再现，显示位错阵列是平面的，不平行于箔表面。
After previous work producing a successful 3D tomographic reconstruction of dislocations in GaN from conventional weak-beam dark-field (WBDF) images, we have reconstructed a cascade of dislocations in deformed and annealed silicon to a comparable standard using the more experimentally straightforward technique of STEM annular dark-field imaging (STEM ADF). In this mode, image contrast was much more consistent over the specimen tilt range than in conventional weak-beam dark-field imaging. Automatic acquisition software could thus restore the correct dislocation array to the field of view at each tilt angle, though manual focusing was still required. Reconstruction was carried out by sequential iterative reconstruction technique using FEI's Inspect3D software. Dislocations were distributed non-uniformly along cascades, with sparse areas between denser clumps in which individual dislocations of in-plane image width 24 nm could be distinguished in images and reconstruction. Denser areas showed more complicated stacking-fault contrast, hampering tomographic reconstruction. The general three-dimensional form of the denser areas was reproduced well, showing the dislocation array to be planar and not parallel to the foil surfaces.