Current state-of-the-art of pulsed laser deposition of optical waveguide structures: Existing capabilities and future trends
Current state-of-the-art of pulsed laser deposition of optical waveguide structures: Existing capabilities and future trends
复制标题
DOI：
10.1016/j.apsusc.2008.07.133
复制
发表时间：
2009-03-01
影响因子：
6.7
通讯作者：
Gazia, R.
中科院分区：
文献类型：
--
作者：
Eason, R. W.;May-Smith, T. C.;Gazia, R.
脉冲激光沉积（PLD）现在已经达到成熟的阶段，薄膜的生长是常规的。所需要的只是一个脉冲紫外线（UV）波长激光器、一个真空室、一个靶和一个放置在等离子体羽流附近的基板。你所生长的薄膜是否是你所需要的薄膜，厚度、均匀性、光学质量、化学计量、结晶度、取向等等是否都是你想要的，这完全是另一个问题。PLD既是一门科学也是一门艺术，需要考虑许多交易技巧，以确保生长的材料是所需的材料。本文讨论了PLD系统的实用性，目标几何形状，晶体薄膜成功外延生长的加热制度，颗粒问题，激光源的使用，以及在我们最新的PLD系统中，使用的独立激光器和目标的数量。我们表明，使用多个目标允许采用组合方法，从而可以调整化学计量来生长设计材料，特别是多层系统，非常适合有源光波导，这是一个真正要求严格的终端应用，其中光学质量和面内损耗必须降低到绝对最小。(C) 2008 Elsevier B.V.版权所有
Pulsed laser deposition (PLD) has now reached a stage of maturity where the growth of thin films is routine. All that is required is a pulsed ultra-violet (UV) wavelength laser, a vacuum chamber, a target, and a substrate placed in near proximity to the plasma plume. Whether the film that you grow is the film that you need, and whether the thickness, uniformity, optical quality, stoichiometry, degree of crystallinity, orientation and much more is what is desired is another question entirely. PLD is both a science and an art and there are many tricks-of-the-trade that need to be considered to ensure that materials grown are the materials wanted. This paper discusses the practicalities of PLD systems, target geometries, heating regimes for successful epitaxial growth of crystalline films, the problem of particulates, laser sources to use, and in the context of our most recent PLD system, the number of independent lasers and targets used. We show that the use of multiple targets permits a combinatorial approach, whereby stoichiometry can be adjusted to grow designer materials, and in particular multilayer systems, ideally suited for active optical waveguides, a truly demanding end application where optical quality and in-plane losses must be reduced to an absolute minimum. (C) 2008 Elsevier B.V. All rights reserved.