Development of a multi-level adaptive fuzzy controller for beyond pull-in stabilization of electrostatically actuated microplates
Development of a multi-level adaptive fuzzy controller for beyond pull-in stabilization of electrostatically actuated microplates
复制标题
DOI：
10.1177/1077546316653040
复制
发表时间：
2018-03
影响因子：
2.8
通讯作者：
Moeen Radgolchin;H. Moeenfard
中科院分区：
文献类型：
--
作者：
Moeen Radgolchin;H. Moeenfard
本文的目的是提出一个监督的多级模糊控制器来控制的静电驱动的微板内和超出其拉入范围的偏转。用扩展Kantorovich法（EKM）推导了微板的模态振型，与有限元结果吻合较好。使用开环仿真，它示出的第一模式形状是有效的占主导地位的。然后，利用沿着单模近似，并采用拉格朗日方程，在模态空间的动力学行为的微板描述为一个常微分方程。通过静态和动态仿真，确定语言上的板偏转对所施加的电压的依赖。然后，基于语言描述的系统，模糊控制器的设计，以稳定在所需的偏转微板。为了提高闭环系统的性能指标，提出了另一个更高层次的模糊控制器，真实的时间调整主控制器的参数。为了保证闭环系统的稳定性，一个非模糊监控单元被附加到控制结构。仿真结果表明，所设计的单级监督自适应控制器能有效地满足控制目标，并具有良好的性能指标。还观察到，在主控制器中添加第二级和监督单元可以减少超调和用于在跟随阶跃命令中静电致动微板的拉入稳定内和拉入稳定外的稳定时间。使用多步和正弦命令进一步证明了所提出的控制器存在下的系统的优良性能。从这项研究中得到的定性知识可以推广和用于N/MEMS致动器和静电驱动的纳/微定位系统的有效控制器的开发。
The objective of this paper is to present a supervised multi-level fuzzy controller to control the deflection of an electrostatically actuated microplate within and beyond its pull-in range. The mode shapes of the microplate are derived using Extended Kantorovich Method (EKM) which are shown to be in great agreement with finite element results. Using open loop simulations, it is shown that the first mode shape is effectively the dominant one. Then by utilizing a single mode approximation along with employing the Lagrange equation, the dynamic behavior of the microplate is described in modal space by an ordinary differential equation. By static and dynamic simulations, dependence of the plate deflection on the applied voltage is identified linguistically. Then based on the linguistic description of the system, a fuzzy controller is designed to stabilize the microplate at desired deflections. To improve the performance specifications of the closed-loop system, another fuzzy controller at a higher level is proposed to adjust the parameters of the main controller in real time. To guarantee the stability of the closed-loop system, a non-fuzzy supervisory unit is attached to the control architecture. The simulations results reveal that by using the presented single level and supervised adaptive controllers, the control objective is met effectively with good performance specifications. It is also observed that adding a second level and a supervisory unit to the main controller can reduce the overshoot and the settling time for within and beyond pull-in stabilization of electrostatically actuated microplates in following the step commands. Excellent performance of the system in the presence of the proposed controller is further demonstrated using multiple step and also sinusoidal commands. The qualitative knowledge resulting from this research can be generalized and used for development of efficient controllers for N/MEMS actuators and electrostatically actuated nano/micro positioning systems.