Atomic force microscopy-based experimental setup for studying domain switching dynamics in ferroelectric capacitors
Atomic force microscopy-based experimental setup for studying domain switching dynamics in ferroelectric capacitors
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DOI：
10.1063/1.1850652
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发表时间：
2005-01
影响因子：
1.6
通讯作者：
C. Dehoff;B. Rodriguez;A. Kingon;R. Nemanich;A. Gruverman;J. Cross
中科院分区：
文献类型：
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作者：
C. Dehoff;B. Rodriguez;A. Kingon;R. Nemanich;A. Gruverman;J. Cross
本文介绍了一种用于微米级铁电电容器畴变动力学和开关电流联合测量的实验装置。该设置是基于一个商业原子力显微镜（AFM），配备了一个压电响应模式域成像和开关电流记录的宽带电流放大器。该设置允许在小至1μm2的电容器中进行组合畴/电流测量，开关时间分辨率低至10 ns。将开关电流测量能力纳入压电响应原子力显微镜，使铁电存储器件的开关行为的详细分析成为可能。
This article describes an experimental setup for combined measurements of domain switching dynamics and switching currents in micrometer scale ferroelectric capacitors. The setup is based on a commercial atomic force microscope (AFM) that is equipped with a piezoresponse mode for domain imaging and with a wide bandwidth current amplifier for switching current recording. The setup allows combined domain/current measurements in capacitors as small as 1μm2 with switching times resolved down to 10ns. The incorporation of switching current measurement capability into piezoresponse AFM makes detailed analysis of switching behavior in ferroelectric memory devices possible.