Design of Coatings in EUV, Soft X-ray and X-ray Spectral Regions

Design of Coatings in EUV, Soft X-ray and X-ray Spectral Regions
复制标题

DOI:
10.1364/oic.2013.tb.6
复制
发表时间:
2013-06
期刊:
--
影响因子:
--
通讯作者:
A. Tikhonravov;M. Trubetskov;S. Sharapova;Zhanshan Wang
A. Tikhonravov;M. Trubetskov;S. Sharapova;Zhanshan Wang
中科院分区:
其他
文献类型:
--
作者:
A. Tikhonravov;M. Trubetskov;S. Sharapova;Zhanshan Wang

文献摘要

被引文献

相似文献

提出了解决从X射线到极紫外光谱范围内各种类型设计问题的方法。它采用了最有效的通用设计工具和特殊技术,旨在考虑界面粗糙度。
Approach to solving all types of design problems in spectral regions from X-ray to EUV is presented. It employs the most efficient general design tools and special technique aimed at taking into account interface roughness.