Nanoscale observation of subgap excitations in β-Si<sub>3</sub>N<sub>4</sub> with a high refractive index using low-voltage monochromated STEM: a new approach to analyze the physical properties of defects in dielectric materials

Nanoscale observation of subgap excitations in β-Si<sub>3</sub>N<sub>4</sub> with a high refractive index using low-voltage monochromated STEM: a new approach to analyze the physical properties of defects in dielectric materials
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使用低压单色STEM对高折射率β-Si<sub>3</sub>N<sub>4</sub>中的亚能隙激发进行纳米级观察:一种分析电介质缺陷物理性质的新方法材料

DOI:
10.35848/1882-0786/ac6e28
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发表时间:
2022
影响因子:
2.3
通讯作者:
Kimoto Koji
Kimoto Koji
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Asano Takanori;Tezura Manabu;Saitoh Masumi;Tanaka Hiroki;Kikkawa Jun;Kimoto Koji

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