Comparing roll-to-roll and laser-assisted hot embossing for micro- and nanofabrication
Comparing roll-to-roll and laser-assisted hot embossing for micro- and nanofabrication
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DOI：
10.1117/12.2321187
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发表时间：
2018-09
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影响因子：
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通讯作者：
A. Habermehl;J. Rakebrandt;P. Brenner;Robert Huber;A. Mertens;M. Guttmann;F. Winkler;Wilhelm Pfleging;C. Eschenbaum;U. Lemmer
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文献类型：
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作者：
A. Habermehl;J. Rakebrandt;P. Brenner;Robert Huber;A. Mertens;M. Guttmann;F. Winkler;Wilhelm Pfleging;C. Eschenbaum;U. Lemmer
我们证明了两种具有成本效益的技术，即辊对辊热压印和激光辅助热压印的适用性，以制造微尺度下到100 nm范围内的结构阵列。因此，我们使用具有相对适中的玻璃化转变温度的聚合物，例如，环烯烃共聚物（COC）和聚苯乙烯（PS）。我们使用不同的1D和2D纳米结构光栅和微流体通道比较了这两种复制过程的精度和成本。所有用于复制的镍基片都是结合电子束或紫外光刻和镍电铸制造的。复制的结构用于不同的应用中。纳米柱阵列涂有金，并集成在热压花的微流体通道中，用于芯片实验室（LoC）表面增强拉曼分析。我们评估所制造的二维纳米柱阵列的表面增强拉曼光谱（Sers）使用的解决方案，罗丹明6G作为示例性的分析物。的几何参数，如直径和间距的聚合物结构的影响，以及金层厚度的影响进行了讨论。一维光栅将被用作有机分布反馈（DFB）激光器的谐振腔。这两种元件，Sers芯片和有机DFB激光器作为可调谐激发源，可以在未来结合起来，形成一个拉曼芯片上的光流体平台，用于灵敏地检测水中的低浓度分析物。
We demonstrate the suitability of two cost efficient technologies, namely roll-to-roll hot embossing and laser-assisted hot embossing, to fabricate arrays of structures in the microscale down to the sub-100 nm range. We therefore employ polymers with a relatively moderate glass transition temperature, e.g., cyclic olefin copolymer (COC) and polystyrene (PS). We compare the two replication processes regarding their precision and cost using different 1D and 2D nanostructure gratings and microfluidic channels. All nickel shims used for the replication are fabricated in combination of electron beam or UV lithography and nickel electroforming. The replicated structures are used in different applications. The nanopillar arrays are coated with gold and integrated in the hot embossed microfluidic channels for lab-on-a-chip (LoC) surface-enhanced Raman analysis. We evaluate the as-fabricated 2D nanopillar arrays for surface-enhanced Raman spectroscopy (SERS) using solutions of rhodamine 6G as exemplary analytes. The influence of the geometrical parameters like diameter and pitch of the polymer structures as well as the influence of the gold layer thickness are discussed. 1D-gratings will be used as resonators for organic distributed feedback (DFB) lasers. Both elements, the SERS chips and the organic DFB lasers as tunable excitation source can be combined in the future to form one Raman-on-Chip optofluidic platform for sensitive detection of low-concentrated analytes in water.