Monolithic microfabricated valves and pumps by multilayer soft lithography
Monolithic microfabricated valves and pumps by multilayer soft lithography
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DOI：
10.1126/science.288.5463.113
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发表时间：
2000-04-07
期刊：
影响因子：
56.9
通讯作者：
Quake, SR
中科院分区：
文献类型：
--
作者：
Unger, MA;Chou, HP;Quake, SR
软光刻是硅基微机械加工的替代方案，其使用非传统弹性材料的复制模塑来制造印模和微流体通道。我们在这里描述的软光刻的扩展。范例多层软光刻，利用该多层软光刻，可以由软材料制造由多个层组成的器件。我们使用这种技术来构建包含开关阀、开关阀和完全由弹性体制成的泵的主动微流体系统。与硅基器件相比，这些材料的柔软性使器件面积减少了两个数量级以上。软光刻的其他优点，例如快速原型制作、易于制造和生物相容性，都得到了保留。
Soft Lithography is an alternative to silicon-based micromachining that uses replica molding of nontraditional elastomeric materials to fabricate stamps and microfluidic channels. We describe here an extension to the soft Lithography. paradigm. multilayer soft lithography, with which devices consisting of multiple Layers may be fabricated from soft materials. We used this technique to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of elastomer. The softness of these materials allows the device areas to be reduced by more than two orders of magnitude compared with silicon-based devices. The other advantages of soft Lithography, such as rapid prototyping, ease of fabrication, and biocompatibility, are retained.