Anisotropic incoherent reflection model for spectroscopic ellipsometry of a thick semitransparent anisotropic substrate.
Anisotropic incoherent reflection model for spectroscopic ellipsometry of a thick semitransparent anisotropic substrate.
复制标题
用于厚半透明各向异性基底的光谱椭圆测量的各向异性非相干反射模型。
DOI：
10.1364/ao.39.002071
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发表时间：
2000
期刊：
影响因子：
1.9
通讯作者：
M. Mooney
中科院分区：
文献类型：
--
作者：
R. Ossikovski;M. Kildemo;M. Stchakovsky;M. Mooney
建立了各向异性轴沿表面法线的光学厚单轴各向异性半透明基板穆勒矩阵元的各向异性非相干反射模型。采用相位调制光谱椭偏仪（SE）测量了Mueller矩阵元素，并与非相干反射模型模拟进行了比较。在蓝宝石衬底的情况下，观察到的振荡被准确地建模，并且，此外，振荡的偏振度被正确地预测。在包含厚的各向异性半透明衬底的任意堆叠层的情况下，还提出了光学模型的直接推广，并进行了实验验证。应用该模型进一步研究了半绝缘4H-SiC晶圆的各向异性介电函数。提出了一种基于光学跃迁元素简单变化的近似方法来模拟碳化硅双折射。总之，SE被证明是研究和预测光学厚双折射材料行为的一个强有力的替代方法。
An anisotropic incoherent reflection model for the Mueller matrix elements of an optically thick uniaxial anisotropic semitransparent substrate with its anisotropy axis along its surface normal is developed. The Mueller matrix elements are measured by phase-modulated spectroscopic ellipsometry (SE) and compared with incoherent reflection model simulations. In the case of a sapphire substrate the oscillations observed are accurately modeled, and, in addition, the oscillating degree of polarization is correctly predicted. A straightforward generalization of the optical model, in the case of an arbitrary stack of layers containing a thick anisotropic semitransparent substrate, is also proposed and experimentally validated. The model is further applied to study the anisotropic dielectric function of a semi-insulating 4H-SiC wafer. An approximation based on a simple variation in the optical transition element is proposed to model the SiC birefringence. In conclusion, SE is shown to be a powerful alternative for investigating and predicting the behavior of optically thick birefringent materials.