Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities
Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities
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DOI：
10.1063/1.4764548
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发表时间：
2012-10-22
影响因子：
4
通讯作者：
Bergonzo, P.
中科院分区：
文献类型：
--
作者：
Checoury, X.;Neel, D.;Bergonzo, P.
我们展示了一个金刚石光子学平台集成悬浮波导腔结构和二维光子晶体（PhC）腔。已经使用自上而下的方法从薄的纳米晶金刚石膜制造了具有超过2800的品质因数的PHC腔。开发的技术过程允许人们以完全平面的几何形状访问这些腔体，包括使用透镜光纤从外部注入和收集光。这种金刚石平台为大规模制造包括光学传感器芯片在内的光子器件开辟了道路。(C)2012年美国物理学会。[http：//dx.doi.org/10.1063/1.4764548]
We demonstrate a diamond photonics platform with integrated suspended waveguide-cavity structures and two dimensional photonic crystal (PhC) cavities. PhC cavities with quality factors exceeding 2800 have been fabricated using a top-down approach from thin nanocrystalline diamond films. The developed technological process allows one to access these cavities in a fully planar geometry, including light injection and collection from the outside using lensed-fibers. This diamond platform opens the road to large scale fabrication of photonics devices including optical sensor chips. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4764548]