Epitaxial growth of LiNbO3 thin films by excimer laser ablation method and their surface acoustic wave properties
Epitaxial growth of LiNbO3 thin films by excimer laser ablation method and their surface acoustic wave properties
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DOI：
10.1063/1.107774
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发表时间：
1992-08
影响因子：
4
通讯作者：
Y. Shibata;K. Kaya;Kageyasu Akashi;M. Kanai;T. Kawai;S. Kawai
中科院分区：
文献类型：
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作者：
Y. Shibata;K. Kaya;Kageyasu Akashi;M. Kanai;T. Kawai;S. Kawai
我们使用准分子激光烧蚀技术在蓝宝石衬底（001）上形成了高质量的LiNbO3外延薄膜，并评估了这些薄膜的表面声波（SAW）特性。结果表明，蓝宝石上的LiNbO3薄膜具有较高的传播速度（5300-6600 m/s）和良好的温度系数（−34 ~−80 ppm/°C），是高频SAW滤波器的候选材料。
We have formed epitaxial LiNbO3 thin films of high quality on sapphire substrates (001) using an excimer‐laser ablation technique and evaluated the surface acoustic wave (SAW) properties of these films. It is demonstrated that the LiNbO3 thin films on the sapphire are the candidates for a high frequency SAW filter because of their high velocities of propagation (5300–6600 m/s) and good temperature coefficients (−34 to −80 ppm/ °C).