Scaling of micro- and nanodevices actuated by Casimir forces
Scaling of micro- and nanodevices actuated by Casimir forces
复制标题
卡西米尔力驱动的微米和纳米器件的缩放
DOI：
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发表时间：
2005
期刊：
影响因子：
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通讯作者：
R. Esquivel
中科院分区：
文献类型：
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作者：
J. Bárcenas;L. Reyes;R. Esquivel
在充分考虑材料的介电性质以及微纳系统中可移动元件的有限厚度的情况下，研究了微纳机电系统中卡西米尔力的影响。所得到的方程是精确的，并且从分叉图中确定了跳跃接触前的临界分离。它显示了临界分离如何改变，例如，随着材料的介电性质的变化，以及如何根据分叉图中的信息来重新标度这些系统。
The effect of the Casimir force in micro- and nanoelectromechanical systems is examined taking fully into account the dielectric properties of the materials, as well as the finite thickness of movable elements in micro- and nanosystems. The resulting equations are exact, and from the bifurcation diagrams the critical separation before jump-to-contact is determined. It is shown how the critical separation changes, for example, with the dielectric properties of the materials and how these systems can be rescaled based on the information from the bifurcation diagrams.