Nanometer-Sized Crystalline Clusters of IGZO Films Determined from the Grazing Incidence X-ray Scattering and Anomalous X-ray Scattering Data Combined with Reverse Monte Carlo Simulations

Nanometer-Sized Crystalline Clusters of IGZO Films Determined from the Grazing Incidence X-ray Scattering and Anomalous X-ray Scattering Data Combined with Reverse Monte Carlo Simulations
复制标题

掠入射 X 射线散射和反常 X 射线散射数据结合逆蒙特卡罗模拟确定 IGZO 薄膜的纳米尺寸晶簇

DOI:
10.2320/matertrans.m2018231
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发表时间:
2018
影响因子:
1.2
通讯作者:
Kawamata Toru
Kawamata Toru
中科院分区:
材料科学4区
文献类型:
--
作者:
Waseda Yoshio;Sugiyama Kazumasa;Kawamata Toru

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