Nanometer-Sized Crystalline Clusters of IGZO Films Determined from the Grazing Incidence X-ray Scattering and Anomalous X-ray Scattering Data Combined with Reverse Monte Carlo Simulations
Nanometer-Sized Crystalline Clusters of IGZO Films Determined from the Grazing Incidence X-ray Scattering and Anomalous X-ray Scattering Data Combined with Reverse Monte Carlo Simulations
复制标题
掠入射 X 射线散射和反常 X 射线散射数据结合逆蒙特卡罗模拟确定 IGZO 薄膜的纳米尺寸晶簇
DOI:
10.2320/matertrans.m2018231
复制
发表时间:
2018
影响因子:
1.2
通讯作者:
Kawamata Toru
中科院分区:
文献类型:
--
作者:
Waseda Yoshio;Sugiyama Kazumasa;Kawamata Toru