Theoretical and Experimental Study of Annular-Plate Self-Sealing Structures
Theoretical and Experimental Study of Annular-Plate Self-Sealing Structures
复制标题
环形板自密封结构的理论与实验研究
DOI：
10.1109/jmems.2007.911371
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发表时间：
2008
影响因子：
2.7
通讯作者：
Yong Xu
中科院分区：
文献类型：
--
作者：
Zhuo Wang;Yong Xu
对于MEMS器件来说，粘滞是一个臭名昭著的良率和可靠性问题。然而，这种现象可以用来实现一些新的微结构或器件。本文对利用粘滞现象的环形板自密封结构进行了理论分析和实验研究。通过计算干燥过程中干燥板的总能量，提出了一种有助于选择合适参数的理论指导方针。我们推导出一个临界数Nc，作为预测环形板是否会发生粘连的设计准则。实验验证了该设计准则的准确性。
Stiction is a notorious yield and reliability problem for MEMS devices. Nevertheless, this phenomenon can be utilized to realize some novel microstructures or devices. This paper presents the theoretical analysis and experimental investigation of an annular-plate self-sealing structure which takes advantage of the stiction phenomenon. A theoretical guideline that helps to select appropriate parameters was developed by calculating the total energy of the plate during the drying process. We derived a critical number Nc, which is used as a design criterion to predict whether stiction of the annular plate will occur or not. The accuracy of this design guideline was also verified experimentally.