RTN-based defect tracking technique: Experimentally probing the spatial and energy profile of the critical filament region and its correlation with HfO2RRAM switching operation and failure mechanism
RTN-based defect tracking technique: Experimentally probing the spatial and energy profile of the critical filament region and its correlation with HfO2RRAM switching operation and failure mechanism
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DOI:
10.1109/vlsit.2016.7573402
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发表时间:
2016-06
期刊:
影响因子:
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通讯作者:
Chai Zheng;Jigang Ma;W. Zhang;B. Govoreanu;Eddy Simoen;J. Zhang;Z. Ji;Rui Gao;Guido Groeseneken;Malgorzata Jurczak
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文献类型:
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作者:
Chai Zheng;Jigang Ma;W. Zhang;B. Govoreanu;Eddy Simoen;J. Zhang;Z. Ji;Rui Gao;Guido Groeseneken;Malgorzata Jurczak
For the first time, an RTN based defect tracking technique has been developed that can monitor the defect movement and filament alteration in RRAM devices. Critical filament region has been identified during switching operation at various conditions and new endurance failure mechanism is revealed. This technique provides a useful tool for RRAM technology development.