Three-dimensional and multimaterial microfabrication using focused-ion-beam chemical-vapor deposition and its application to processing nerve electrodes
Three-dimensional and multimaterial microfabrication using focused-ion-beam chemical-vapor deposition and its application to processing nerve electrodes
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DOI：
10.1116/1.1821581
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发表时间：
2004-12
影响因子：
1.4
通讯作者：
T. Hoshino;M. Kawamori;Takafumi Suzuki;S. Matsui;K. Mabuchi
中科院分区：
文献类型：
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作者：
T. Hoshino;M. Kawamori;Takafumi Suzuki;S. Matsui;K. Mabuchi
将电极连接到神经元的方法之一是再生电极。电极位于神经的两个切割端之间。切断的神经纤维通过二维 (2D) 再生电极平面中的金属化保持电极再生。由于这种类型的电极具有既可以记录单个神经纤维的信号又可以刺激单个神经纤维的优点，因此人们尝试使用传统的二维微加工技术来开发它。然而，这些传统的2D技术使得加工此类电极变得困难，特别是具有高密度和集成结构的电线。在这项研究中，我们开发了一种新颖的微加工方法，可以通过聚焦离子束化学气相沉积（FIB-CVD）来制造由多种材料制成的三维（3D）微/纳米结构。为了证明该技术的可行性，我们设计并制造了一种改进型的再生...
One of the ways to interface electrodes to neurons is a regenerative electrode. The electrode is between the two cut end of a nerve. The cut nerve fiber regenerates through a metalized hold electrode in a two-dimensional (2D) planar of regenerative electrode. As this type of electrode has advantages enabling both the recording of signals of a single nerve fiber and the stimulation of a single nerve fiber, attempts have been made to develop it using traditional 2D microfabrication techniques. However, these traditional 2D techniques have made it difficult to process such electrodes, in particular, electrical wires that have a high density and an integrated structure. In this study, we developed a novel microfabrication method that enables three-dimensional (3D) micro/nanostructures to be fabricated that are made of several kinds of materials with focused-ion-beam chemical-vapor deposition (FIB-CVD). To demonstrate the feasibility of this technique, we designed and fabricated a modified type of regenerative...