A focused-ion-beam-fabricated micro-paddle resonator for mass detection
A focused-ion-beam-fabricated micro-paddle resonator for mass detection
复制标题
用于质量检测的聚焦离子束制造的微桨谐振器
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
C. Hamlett
中科院分区：
文献类型：
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作者：
B. Boonliang;P. Prewett;J. Hedley;J. Preece;C. Hamlett
实验微机电系统桨式谐振器，使用聚焦离子束制造从200 nm厚的氮化硅膜和研究使用激光测振仪的谐振频率检测。根据要求，发现基模为扭转模，在20 μbar的试验压力下，谐振频率为1.38 MHz，Q值为1070。质量灵敏度为55 ag Hz−1，接近分析和有限元分析建模的结果，证明了原理的证明。
An experimental microelectromechanical system paddle resonator was made using focused ion beam fabrication from a 200 nm thick silicon nitride membrane and investigated using a laser vibrometer for resonant frequency detection. The fundamental mode was found to be torsional, as required, with a resonant frequency of 1.38 MHz and Q of 1070 at a test pressure of 20 μbar. The mass sensitivity was 55 ag Hz−1, close to the results of analytical and finite element analysis modeling, demonstrating proof of principle.